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http://www.journals.elsevier.com/surface-and-coatings-technology/
study of the effect of rf power and process pressure on the morphology of copper and titanium sputtered by
http://www.sciencedirect.com/science/article/pii/S0257897216310118
0.150.430no00q -> urls with study of the effect of rf power and process pressure on the morphology of copper and titanium sputtered by in atext
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